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Marks a milestone in preparing High NA EUV lithography for accelerated adoption in mass manufacturing.
June 3, 2024
By: DAVID SAVASTANO
Editor, Ink World Magazine
Imec and ASML Holding N.V. announced the opening of the High NA EUV Lithography Lab in Veldhoven, the Netherlands, a lab jointly run by ASML and imec. After a build and integration period of years, the Lab is ready to provide leading-edge logic and memory chip makers, as well as advanced materials and equipment suppliers access to the first prototype High NA EUV scanner (TWINSCAN EXE:5000) and surrounding processing and metrology tools. The opening of the joint ASML-imec High NA EUV Lab re...
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